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Linde LienHwa Invests in Local Production of Electronic Materials at Taiwan Facilities

Linde LienHwa Invests in Local Production of Electronic Materials at Taiwan Facilities

 –   C4F8 (octafluorobutane) purification and filling facility in Taichung 
–   HCDS (hexachlorodisilane) transfill facility in Guanyin 

Linde LienHwa, a member of The Linde Group and a leading supplier of gases and chemicals to the electronics industry, continues to invest in local production of electronic special gases (ESGs). This enhances its portfolio to meet the growing demand of Taiwanese and regional customers in the semiconductor and display industries. LLH is leveraging access to global expertise to build first-in-kind capabilities in Taiwan to innovate locally for customers.  

Linde LienHwa’s capability for purification and filling of C4F8 in Taichung Harbor is outstanding in Taiwan. With over 100 tons per year of capacity, Linde LienHwa is positioned to meet demand in Taiwan as well as serve customers throughout Asia. An etching gas, C4F8 enables semiconductor manufacturers to cut chip patterns at leading-edge dimensions and also create the conduits through which several chips can be electrically connected. In addition, C4F8 is used to clean production chambers in predominantly older-sized semiconductor tools.

Another step forward in Taiwan is LindeLienHwa’s transfilling facility for HCDS in Guanyin, a district of Taoyuan City. The transfill process involves repackaging material into specialized stainless steel vessels while improving the purity and validating the quality. This Linde LienHwa investment is sized to serve both Taiwan and customers throughout Asia. HCDS is used for depositing silicon compounds at very low process temperatures, which is important for making nanoscale electrical insulators in memory and logic processor chips. 

Linde LienHwa maintains one of the largest Taiwan-wide networks of on-site gas production, electronic bulk gases, ESGs, ultra-pure wet chemicals, chemical production and stocking facilities. Linde LienHwa offers an impressive range of electronics materials that is among the best in the industry. Its products enable cutting-edge manufacturing in the semiconductor, solar, display and solid state lighting/LED industries.

Linde Electronics, its global partner, is the electronics materials and service business of The Linde Group, an industry leader in the industrial gas sector. Linde Gas operates in more than 100 countries, with world-class R&D centers, including its newest electronics R&D center in Taichung Harbor. Linde Engineering designs and builds gas generators that excel in purity, efficiency and up-time. 

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